World’s First Semiconductor Wafer Fab to Use Swirling Induction Type HVAC
Mie Fujitsu Semiconductor Limited
Takasago Thermal Engineering Co., Ltd.
Yokohama and Tokyo, Japan, November 5, 2015 – Mie Fujitsu Semiconductor Limited today announced that the company’s Mie plant in Kuwana, Mie Prefecture, is adding a new production line that uses advanced, environmentally-friendly technologies. The cleanroom is equipped throughout with SWIT® (Swirling Induction Type HVAC System) from Takasago Thermal Engineering Co., Ltd., which will have a smaller environmental footprint than conventional systems while ensuring high-quality manufacturing. This is the world’s first use of this technology in wafer fabrication cleanrooms for semiconductors.
Mie Fujitsu Semiconductor and Takasago Thermal Engineering focused on reducing the plant’s environmental footprint while maintaining the priority on safety and short construction time, seeking to design and build an environmentally friendly eco-plant. For the HVAC system in particular, they chose the most advanced technology and built a system with outstanding energy efficiency.
The cleanroom uses SWIT, or swirling induction type HVAC, which creates temperature strata inside the cleanroom, and works with rising air currents created by heat-generating equipment to carry airborne dust toward the ceiling. This makes it possible to maintain a steady temperature in the work areas at lower elevations in the room more efficiently, so that the volume of air being supplied can be lower than in conventional HVAC systems. Also, because this allows for air to be supplied at a higher temperature, the chilled-water temperature can also be higher, which contributes to energy savings. Compared to existing systems, the annual energy used is expected to be roughly 47% lower for transport power and roughly 32% lower for heat-source power (*1).
Additionally, this system helps to simplify building construction, so it contributes greatly to a shorter construction process and lower construction costs.
Mie Fujitsu Semiconductor is building this clean room to run a 40-nm process line. Due to go into service in fiscal 2016, it will provide customers with ultralow-power technologies and embedded non-volatile memory technologies, for the IoT market and automotive electronics.
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Glossary and Notes
*1： Estimate of HVAC transport power, cleanroom-load handling chillers.
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